; WARNING: This is a rough estimate of what AMI 0.5um would look like ; You need to get precise info from MOSIS ; Faisal Abu-Nimeh asd1815@msu.edu chipx = 1024 ; dimensions of the chip in x direction chipy = 1024 ; dimensions of the chip in y direction fftx = 256 ; x-fft size (must be a power of 2) ffty = 256 ; y-fft size TechFile = AMI_06.tek TechPath = . 0 ; p(-) Layer rho = 10 ; ohm-cm t = 800 ; microns eps = 11.9 1 rho = .3 t = 5 eps = 11.9 2 ; Oxide Layer rho = 1e10 t = 50 eps = 4 0 layer = 1 rsh = 30 t = 0.1 d = 4.8 name = msub color = pink 1 layer = 2 rsh = 90 t = .5 d = 1 smin = .5 wmin = .5 name = m1 color = blue 2 layer = 2 rsh = 90 t = .5 d = 2 smin = .5 wmin = .5 name = m2 color = yellow 3 layer = 2 rsh = 50 t = .8 d = 3 smin = 2.1 wmin = 1 name = m3 color = red 0 ; metal 1 to metal 0 (substrate contact layer) top = 1 bottom = 0 r = 4 width = .6 space = .9 overplot1 = .6 ; to metal substrate overplot2 = .3 name = v0 color = gray 1 ; metal 2 to metal 1 top = 2 bottom = 1 r = 4 width = .6 space = .9 overplot1 = .3 ; to metal1 overplot2 = .3 ; to metal2 name = v1 color = purple 2 ; metal 3 to metal 2 top = 3 bottom = 2 r = 2 width = .6 space = .9 overplot1 = .3 overplot2 = .3 name = v2 color = green